Olympus OLS3100 User Manual download pdf (Page 8)

Versatile observation methods to handle a wide range of applic

● Brightfield observation

Color information can be obtained from brightfield (color)

observation. Therefore, brightfield observation can be used

effectively to observe a flaw on a color filter or to locate the

position of an area of corrosion on metal.

● DIC (Differential Interference Contrast) observation

In DIC observation, it is possible to observe a scratch or flaw as

small as a few nanometers in height that could not be observed in

a brightfield observation.

● Laser confocal

Observation with a much higher level of resolution impracticable

with conventional microscopes is now possible through a

combination of a 408 nm laser and confocal optics.

● Laser confocal DIC

Microscopic unevenness on a surface can be observed in three

dimensions in real time, which is impossible with conventional

laser microscopes. Observation of surface conditions with the

level of dimensional reality comparable to that of an SEM has

been made fully possible, opening up a new dimension in surface

profile observation.

Display

Laser printer toner

Reverse face of a wafer

Circuits patterns on wafer

Polymeric film

Non confocal image

Confocal image

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Olympus OLS3100 User Manual Page 8